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Fast Entry Load Lock

Product code: KS100-MD16-TSMD-XXXX-YYYY

The KS100 is designed for the fast and clean introduction of samples into a UHV system. Samples are loaded through an O-ring sealed door, onto an MD16 magnetically driven linear-rotary feedthrough.
A total of four CF ports is provided:

  • Mounting flange DN100CF fixed
  • Pumping port DN40CF rotateable, tapped M6
  • Vacuum gauge port DN40CF rotateable, tapped M6
  • Viewport flange DN40CF fixed, tapped M6
Order codes standard travel range:
  • 300mm travel: KS100-MD16-300-15
  • 400mm travel: KS100-MD16-400-15
  • 500mm travel: KS100-MD16-500-15
Order code customized version:
  • KS100-MD16-XXX-YYY
XXX: linear travel in millimeters (min. 250mm)
YYY: retracted length, flange face of CF16 to end of shaft in millimeters (min. 15mm)


On request, the KS100 can be supplied with a DN100CF gate valve, ion gauge, view port, and turbo molecular pump.


Specifications: Fast Entry Load Lock

linear travel: ≤ 500mm
retracted length: ≥ 15mm and ≤ 515mm; standard 30mm

  • MD16 linear travel customer defined.
  • continuous rotation
  • Bakeout temperature: 150°C max.
  • He leak rate < 1x10-9 mbar*l/s
  • Fully UHV compatible materials
  • Body and flanges St 1.4301 (AISI 304L)

download drawing in pdf format

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