List price:

3'601.96 CHF

3'744.52 EUR *
3'986.79 USD *

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.961929 CHF
1 CHF = 1.0396 EUR
1 USD = 0.903474 CHF
1 CHF = 1.1068 USD

Load lock chamber with O-ring sealed quick access door.
Transfer flange DN63CF, 3 additional ports DN40CF, 1 port DN16CF.

flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63, flange, tapped, fast entry, entry load, load lock, flange dncf, port dncf, linear rotary, rotary feedthrough, dncf rotatable, revolving sample, sample carrier, fast entry load, entry load lock, linear rotary feedthrough, flange dncf rotatable, revolving sample carrier, KS63

Fast Entry Load Lock

Product code: KS63

The KS63 is designed for the fast and clean introduction of samples, STM tips or crucibles into a UHV system. Samples are loaded through a O-Ring sealed door at the rear end of the load lock, usually onto a MD16 magnetically driven linear-rotary feedthrough
In addition to the mounting flange DN63CF, follwoing ports are provided (named just with examples):

Mounting flange DN63CF, rotatable
Pumping port DN63CF, rotateable, tapped M8
Vacuum gauge port DN40CF, rotateable, tapped M6
Viewport flange DN63CF, rotatable, tapped M8
Viewport flange DN40CF, rotatable, tapped M6
Transporter port DN16CF, fixed, tapped M4

Order code:

KS63 load lock chamber

customized versions:

flange positions and number of ports can be altered on request.

load lock accessories:

On request, the KS63 can be supplied with a DN63CF gate valve, ion gauge, view port, and turbo molecular pump and MD16 linear-/rotary feedthrough.

Specifications: Fast Entry Load Lock

Bakeout temperature 150°C
He leak rate < 1x10-9 mbar*l/s
Fully UHV compatible materials Body and flanges St 1.4301 (AISI 304L)

Downloads: drawing (pdf) / 3D-model (stp)