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Fast Entry Load Lock

Product code: KSWM63-63

The KSWM63 is designed for the fast and clean introduction of samples using a wobblestick manipulator. Samples are loaded through an O-Ring sealed door at the top or side of the load lock. In addition to the mounting flange and the pumping port DN63CF, one DN40CF and one DN40CFWS port are provided: · Viewport flange (fixed, tapped M6) · DN40CFWS (wobblestick flange) port for Wobblestick (fixed, tapped holes M6) On request, the KS63 can be supplied with a DN63CF gate valve, ion gauge, view port, and turbo molecular pump. The standard KS63 is made from stainless steel AISI 304L.


Specifications: Fast Entry Load Lock

  • Bakeout temperature 150°C
  • He leak rate < 1x10-9 mbar*l/s
  • Fully UHV compatible materials
  • Body and flanges Stainless Steel AISI 304L

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