Sign in

Fast Entry Load Lock

Product code: KS63-MD16-TSMD

The KS63 is designed for the fast and clean introduction of samples, STM tips or crucibles into a UHV system. Samples are loaded through a O-Ring sealed door at the rear end of the load lock onto a MD16 magnetically coupled linear-rotary feedthrough.
A total of four CF ports is provided:

  • Mounting flange DN63CF fixed
  • Pumping port DN40CF rotateable, tapped M6
  • Vacuum gauge port DN40CF rotateable, tapped M6
  • Viewport flange DN40CF fixed, tapped M6
Order codes standard travel range:
  • 300mm travel: KS63-MD16-300-15
  • 400mm travel: KS63-MD16-400-15
  • 500mm travel: KS63-MD16-500-15
Order code customized version:
  • KS63-MD16-XXX-YYY
XXX: linear travel in millimeters (min. 250mm)
YYY: retracted length, flange face of CF16 to end of shaft in millimeters (min. 15mm)


On request, the KS63 can be supplied with a DN63CF gate valve, ion gauge, view port, and turbo molecular pump.


Specifications: Fast Entry Load Lock

adds 530.0 to dimension Z of the main product

  • linear travel: customized
  • retracted shaft lenght: customized
  • rotation: continuous
  • torque: 0.5 Nm
  • linear force: 30N
  • bakeout temperature: 150°C
  • He leak rate: < 1x10-9 mbar
  • fully UHV compatible materials: body and flanges St 1.4301 (AISI 304L)

download drawing in pdf format

Ferrovac Gmbh | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | sales@ferrovac.com | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
© Ferrovac GmbH 2018 | © vogy GmbH 2018