List price:

5'770.12 CHF

5'938.11 EUR *
6'441.66 USD *

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.97171 CHF
1 CHF = 1.0291 EUR
1 USD = 0.89575 CHF
1 CHF = 1.1164 USD

Load lock chamber with O-ring sealed quick access door and MD16 linear/rotary feedthrough with tube support, transfer flange DN63CF, 3 additional ports DN40CF.

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rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf 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lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry 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feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, 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feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, entry load lock, load lock linear, lock linear rotary, flange dncf rotatable, revolving sample carrier, KS63-MD16-TSMD, linear, rotary, feedthrough, flange, tapped, fast entry, entry load, load lock, lock linear, flange dncf, dncf rotatable, port dncf, revolving sample, sample carrier, fast entry load, 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Fast Entry Load Lock with Linear/Rotary Feedthrough

Product code: KS63-MD16-TSMD-XXXX-YYYY

The KS63 is designed for the fast and clean introduction of samples, STM tips or crucibles into a UHV system. Samples are loaded through a O-Ring sealed door at the rear end of the load lock onto a MD16 magnetically coupled linear-rotary feedthrough.
Following ports are provided:

Mounting flange DN63CF, rotatable
Pumping port DN63CF, rotateable, tapped M8
Vacuum gauge port DN40CF, rotateable, tapped M6
Viewport flange DN63CF, rotatable, tapped M8
Viewport flange DN40CF, rotatable, tapped M6
Transporter port DN16CF, fixed, tapped M4 (allready mounted MD16 incl.)

Order code customized version:

KS63-MD16-XXX-YYY

XXX: linear travel in millimeters (min. 250mm)
YYY: retracted length, flange face of CF16 to end of shaft in millimeters (min. 15mm)

load lock accessories:

On request, the KS63 can be supplied with a DN63CF gate valve, ion gauge, view port, and turbo molecular pump.

Specifications: Fast Entry Load Lock with Linear/Rotary Feedthrough

MD16 linear travel X >= 10mm AND <= 500mm
MD16 retracted length Y >= 12.3mm AND <= 250mm; standard 30mm

linear travel: customized
retracted shaft length: customized
rotation: continuous
torque: 0.5 Nm
linear force: 30N
bakeout temperature: 150°C
He leak rate: < 1x10-9 mbar
body and flanges St 1.4301 (AISI 304L)

Downloads. drawing (pdf) / 3D-model (stp)