List price:

9'331.53 CHF

9'603.20 EUR *
10'417.56 USD *

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.97171 CHF
1 CHF = 1.0291 EUR
1 USD = 0.89575 CHF
1 CHF = 1.1164 USD

Single axis high precision bellows sealed manipulator with manual, large OD micrometer.
Base flange DN63CF (4.5" OD).
Travelling flange DN63CF (4.5" OD).

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Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, 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Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MZ, Stages, XYZ-Axis, Z-Axis, Z-Stages, Z-Stage, Z-Bewegung, 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Boomerax Z Stage DN65, 100mm travel

Product code: MZ63CF63CF63-0100

The Boomerax MZ63 Z-drives offer a sturdy yet compact construction for accurate linear motion while their highest quality edge welded bellows fulfil the strictest requirements in terms of leak tightness and durability.
Short as well as long versions of the MZ63 have a continuous free bore, as the supports of their bellows are mounted externally.
Boomerax Z-drives are commonly combined with our Boomerax XY-Manipulators and differentially pumped rotary platforms to form a complete XYZR manipulator.

BOOMERAX_Manipulators_Questionnaire_Ferrovac.pdf

Specifications: Boomerax Z Stage DN65, 100mm travel

Z travel: 100mm
continuous inner free bore, ID: 65mm
resolution: 5 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
- transmission: 1:2
  - helical/screw gear Unit: 2:1
  - spindle Pitch: 4mm
mounting flange: DN63CF with through holes for M8 (other flanges on request)
travelling flange: DN63CF with through holes for M8 (other flanges on request)
bakeout temperature: 200 °C max.
pressure range: 1E-11 to 1000 mbar
He leak rate: <1E-10 mbar*l/s